China has begun manufacturing domestically developed immersion deep ultraviolet (DUV) lithography machines, a key chipmaking tool long dominated by Dutch supplier ASML, according to a report by The Information.
Details of the Report
The machines are expected to be delivered this year to leading Chinese chipmakers, including Semiconductor Manufacturing International Corp, Hua Hong Semiconductor and ChangXin Memory Technologies. The breakthrough could eventually challenge ASML in China, but the system still lags on performance and reliability and needs further testing before mass production.
Production will be limited initially, with about five DUV machines this year and roughly 20 in 2027. Immersion DUV machines, which print circuit patterns onto silicon wafers, are the most advanced lithography tools available to Chinese chipmakers after restrictions cut off access to extreme ultraviolet lithography (EUV) systems.
China is also developing a domestic EUV machine, though it remains at the prototype stage. The technology could give Chinese chipmakers an alternative source of critical equipment as the U.S. considers tighter restrictions on foreign lithography tool exports and servicing in China.
Original reporting: Appleton, WI News Feed (HLL/CB) — read the source article.
